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ULSI極微細配線におけるGHzエレクトロマイグレ-シヨン耐性限界評価法の確立
ULSI極微細配線におけるGHzエレクトロマイグレ-シヨン耐性限界評価法の確立
Paper
図書
益, 一哉, 東京工業大学
2001-2002
<Y151-H13555090>
National Diet Library
Subject Heading
集積回路 シリコン 微細配線 エレクトロマイグレ-シヨン 高速信号処理
伝送線路配線
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