Search results for "低エネルギーイオン照射" | NDL Search | National Diet Library

Jump to main content

Library

National Diet Library Other Libraries in Japan

Available online

Title

Author/Editor

Publisher

Year

yr 〜

yr

1990s(2)

ISBN / ISSN

Call number

Material type Link to Help Page

Books （2）

Periodicals

Newspapers

Japanese and Chinese Old Materials

Doctoral Dissertations

Maps

Musical Scores

Web sites

Online Publications

Electronic Resources

Video Materials

Audio Materials

Standards and Technical Reports

Manuscripts and Images

Periodical article etc

Material Format Link to Help Page

Digital

Paper （2）

Microform

Recording Media

Subject Link to Help Page

Search results 2

Group by title

垂直極微細加工可能なSiの自己制限型原子層エツチング技術の開発

Paper図書

松浦, 孝, 東北大学1994-1996<Y151-H06555089>

National Diet Library

Subject Heading原子層エツチングシリコン自己制限型 ECRプラズマ塩素低エネルギーイオン照射ゲルマニウム極微細MOS

次世代のプラズマ対向材料-燃料粒子相互作用の研究

Paper図書

山脇, 道夫, 東京大学1995-1997<Y151-H07045020>

National Diet Library

Subject Headingプラズマー材料相互作用反射透過質量分析トリチウム核融合粒子制御低エネルギーイオン照射計算機シミユレーシヨン

Reached to the end of result.

RSSRSS

言語：日本語

How to access the materials

National Diet Library Home Page

Contact Us News Privacy Policy Site Policy

© 2024- National Diet Library, Japan.

Page Num.202