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反応性亜臨界,超臨界炭酸ガスとオゾンによる低吸着性,
低ガス放出性酸化膜
の製作
反応性亜臨界,超臨界炭酸ガスとオゾンによる低吸着性,低ガス放出性酸化膜の製作
Paper
図書
百瀬, 丘, 宮城工業高等専門学校
1997-1999
<Y151-H09555220>
National Diet Library
Subject Heading
オゾン処理 超臨界炭酸ガス
低ガス放出性酸化膜
低吸着性酸化膜
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