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タンタル系固溶体合金の陽極酸化膜による薄膜コンデンサの作製とその信頼性の評価
タンタル系固溶体合金の陽極酸化膜による薄膜コンデンサの作製とその信頼性の評価
Paper
図書
佐々木, 克孝, 北見工業大学
2001-2002
<Y151-H13650329>
National Diet Library
Subject Heading
陽極酸化膜キヤパシタ Ta-Zr合金膜 高誘電率化 耐熱性
低損失特性
漏れ電流特性 Schottky伝導
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