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高品質極薄Si系絶縁膜の低温形成と機能評価に関する研究
高品質極薄Si系絶縁膜の低温形成と機能評価に関する研究
Paper
図書
中島, 寛, 九州大学
1997-1998
<Y151-H09650363>
National Diet Library
Subject Heading
シリコン 極薄絶縁膜 ECRプラズマ
低温薄膜形成
電気的機能性 スパツタリング
放射光励起ガスソースCVDによる高誘電体薄膜の低温形成
放射光励起ガスソースCVDによる高誘電体薄膜の低温形成
Paper
図書
庭野, 道夫, 東北大学
1991-1993
<Y151-H03452149>
National Diet Library
Subject Heading
放射光 高誘電体薄膜
低温薄膜形成
半導体表面 光励起反応 CVD
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