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ナノポ-ラス/有機構造
低誘電率膜
と金属電極の界面制御
ナノポ-ラス/有機構造低誘電率膜と金属電極の界面制御
Paper
図書
吉川, 公麿, 広島大学
1999-2001
<Y151-H11450126>
National Diet Library
Subject Heading
低誘電率膜
有機膜 多層配線 集積回路 銅配線 ポ-ラス 金属電極 拡...
高速・高均一デジタルCVDを用いたULSI用高機能性薄膜の作製
高速・高均一デジタルCVDを用いたULSI用高機能性薄膜の作製
Paper
図書
堀池靖浩, 東洋大学
1995-1995
<Y151-H05555089>
National Diet Library
Subject Heading
デジタルCVD ULSI 高機能性薄膜 積層層間絶縁膜 コンフオーマルCVD
低誘電率膜
時間変調プラズマ バイアススパツタ
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