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放射光励起ガスソースCVDによる高誘電体薄膜の低温形成
放射光励起ガスソースCVDによる高誘電体薄膜の低温形成
Paper
図書
庭野, 道夫, 東北大学
1991-1993
<Y151-H03452149>
National Diet Library
Subject Heading
放射光 高誘電体薄膜 低温薄膜形成 半導体表面
光励起反応
CVD
レーザ光励起表面反応過程のミクロ解析と原子層エピタキシーへの応用
レーザ光励起表面反応過程のミクロ解析と原子層エピタキシーへの応用
Paper
図書
松波, 弘之, 京都大学
1994-1995
<Y151-H06452111>
National Diet Library
Subject Heading
有機金属分子線エピタキシー
光励起反応
表面反応 光励起原子層エピタキシー その場観察 反射高速電...
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