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光学超薄膜
を用いた軟X線干渉計測法の開発と精密結像鏡の反射波面計測制御への応用
光学超薄膜を用いた軟X線干渉計測法の開発と精密結像鏡の反射波面計測制御への応用
Paper
図書
山本, 正樹, 東北大学
1999-2001
<Y151-H11305009>
National Diet Library
Subject Heading
軟X線 多層膜 ビームスプリツタ 干渉計 波面計測 波面補正 結像光学系
光学超薄膜
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