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ナノメートル精度を持つ
光線基準
の開発と大型部品の超高精度平面度測定への応用
ナノメートル精度を持つ光線基準の開発と大型部品の超高精度平面度測定への応用
Paper
図書
島田, 尚一, 大阪大学
1997-1998
<Y151-H09555045>
National Diet Library
Subject Heading
直線基準
光線基準
レーザービーム 方向安定性 直線性 追尾性 直進機構 形状...
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