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パルス励起ECRプラズマのエネルギー緩和過程に関する研究
パルス励起ECRプラズマのエネルギー緩和過程に関する研究
Paper
図書
秋津, 哲也, 山梨大学
1998-1999
<Y151-H10680454>
National Diet Library
Subject Heading
反応性スパツタリング 電子サイクロトロン共鳴プラズマ 原子状酸素 圧電性結晶 圧電性微結晶薄膜
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