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GaAsの
分子層成長
とその不純物添加技術に関する研究
GaAsの分子層成長とその不純物添加技術に関する研究
Paper
図書
倉林徹, 半導体研究振興会 [著]
[倉林徹]
2001-2003
<Y151-H13450016>
National Diet Library
Subject Heading
GaAs /
分子層成長
/ 原子層成長 / 自己停止機構 / 反応機構 / 不純物...
分子層成長
用流量制御システムの試作とその応用に関する研究
分子層成長用流量制御システムの試作とその応用に関する研究
Paper
図書
倉林, 徹, 東北大学
1995-1996
<Y151-H07650002>
National Diet Library
Subject Heading
分子層成長
流量制御システム マイクロバルブ コルゲーシヨンダイヤフラ...
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