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循環流動層を用いたモノシランガスからの多結晶シリコン製造に関する基礎的研究
循環流動層を用いたモノシランガスからの多結晶シリコン製造に関する基礎的研究
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図書
古沢, 健彦, 東京大学
1985-1986
<Y151-S60550659>
National Diet Library
Subject Heading
多結晶シリコン モノシラン
化学蒸気析出法
循環流動層 均相反応速度 異相反応速度
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