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ガラス基板表面の核形成点制御による大粒径多結晶薄膜形成法の開発
ガラス基板表面の核形成点制御による大粒径多結晶薄膜形成法の開発
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図書
安武潔, 大阪大学 [著]
[安武潔]
2004-2006
<Y151-H16360070>
National Diet Library
Subject Heading
多結晶Si薄膜 / 大粒径 / ガラス基板 / Ge微結晶 / 結晶核 / 核形成 / 自己組織化 / 固相結晶化
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