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サブ0.1ミクロン薄膜SOI CMOS LSIデバイスの揺らぎに関する研究
サブ0.1ミクロン薄膜SOI CMOS LSIデバイスの揺らぎに関する研究
Paper
図書
平本, 俊郎, 東京大学
1995-1997
<Y151-H07555109>
National Diet Library
Subject Heading
薄膜SOI MOSFET 特性ばらつき しきい値電圧 サブ0.1ミクロンMOSFET
完全空乏
型SOI MOSFET 不純物数の統計的揺らぎ VLSIデバ...
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