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低誘電率・低誘電正接を有する次世代感光性有機層間絶縁膜の開発
低誘電率・低誘電正接を有する次世代感光性有機層間絶縁膜の開発
Paper
図書
上田充, 東京工業大学 [著]
[上田充]
2002-2003
<Y151-H14350484>
National Diet Library
Subject Heading
感光性ポリマー / 耐熱性 / 低誘電性 / 低誘電損失 / 全脂環式感光性ポリイミド / 感光性ポリ (ナフタレン) / アルカリ現像 / 酸発生剤
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