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ガリウム・ヒ素化合物半導体用の超新機能電極材料の研究
ガリウム・ヒ素化合物半導体用の超新機能電極材料の研究
Paper
図書
村上, 正紀, 京都大学
1998-2000
<Y151-H10305051>
National Diet Library
Subject Heading
GaAs オーミツク・コンタクト 低障壁中間層 InGaAs
拡散バリア材
コンタクト抵抗
低周波プラズマCVDによる集積回路配線の
拡散バリア材
としてのTiN膜低温形成
低周波プラズマCVDによる集積回路配線の拡散バリア材としてのTiN膜低温形成
Paper
図書
下妻, 光夫, 北海道大学
1998-1999
<Y151-H10650298>
National Diet Library
Subject Heading
TiN プラズマCVD 薄膜生成 低周波プラズマ 低周波プラズマCVD
拡散バリア材
薄膜低温形成 集積回路材
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