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放射光による任意形状のマイクロ立体構造体デバイス作製プロセスの研究
放射光による任意形状のマイクロ立体構造体デバイス作製プロセスの研究
Paper
図書
服部正, 姫路工業大学 [著]
[服部正]
2001-2003
<Y151-H13450299>
National Diet Library
Subject Heading
放射光 / LIGA / マイクロマシン / X線マスク / ナノ・マイクロファブリケーション / マイクロシステム / MEMS / NEMS
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