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オゾンガスによるシリコンおよびシリコン基セラミツクスの酸化機構解明
オゾンガスによるシリコンおよびシリコン基セラミツクスの酸化機構解明
Paper
図書
成島, 尚之, 東北大学
1999-2000
<Y151-H11650730>
National Diet Library
Subject Heading
オゾン 酸化 シリコン 炭化ケイ素 シリカ
放物線則
速度論 律速段階
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