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核生成・成長過程
独立制御による高品位cBNプラズマ合成
核生成・成長過程独立制御による高品位cBNプラズマ合成
Paper
図書
吉田, 豊信, 東京大学
1996-1998
<Y151-H08405047>
National Diet Library
Subject Heading
立方晶窒化硼素 プラズマプロセス イオン衝撃
核生成・成長過程
低圧ICP-CVD 高周波スパツタリング 水素 rBN
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