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1990s(1)2000s(1)

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超音波楕円振動切削による3次元マイクロ形状の超精密加工

Paper図書

森脇, 俊道, 神戸大学2000-2001<Y151-H12450061>

National Diet Library

Subject Heading楕円振動切削加工法超精密切削ダイヤモンド工具マイクロ加工切りくず...

走査型電子顕微鏡内マイクロマニユフアクチヤリングの研究

Paper図書

森脇, 俊道, 神戸大学1995-1996<Y151-H07455066>

National Diet Library

Subject Headingマイクロマニユフアクチヤリング電子顕微鏡楕円振動切削切削力ばり Walking Drive 超精密位置決め ...

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