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超短パルス光によるナノ微小領域への近接場の局在化と極微細加工への応用
超短パルス光によるナノ微小領域への近接場の局在化と極微細加工への応用
Paper
図書
片岡, 俊彦, 大阪大学
1999-2001
<Y151-H11450030>
National Diet Library
Subject Heading
走査型近接場光学顕微鏡 エバネセント場 Tiサフアイアレーザー 微小共振球
極微小突起
フオトレジスト WGMモード HeCdレーザー
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