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三次元赤外光弾性CT法を用いた大口径半導体結晶塊中の
残留歪み
の非破壊評価
三次元赤外光弾性CT法を用いた大口径半導体結晶塊中の残留歪みの非破壊評価
Paper
図書
山田正良, 京都工芸繊維大学 [著]
[山田正良]
2001-2003
<Y151-H13555004>
National Diet Library
Subject Heading
半導体 / 赤外光弾性 / 非破壊評価 /
残留歪み
顕微赤外光弾性装置の試作
顕微赤外光弾性装置の試作
Paper
図書
山田, 正良, 京都工芸繊維大学
1993-1995
<Y151-H05555004>
National Diet Library
Subject Heading
光弾性 赤外偏光計
残留歪み
化合物半導体 顕微測定
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