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気相雰囲気における半導体表面プロセスのイオンビームその場計測法の開拓
気相雰囲気における半導体表面プロセスのイオンビームその場計測法の開拓
Paper
図書
尾浦, 憲治郎, 大阪大学
1999-2001
<Y151-H11305006>
National Diet Library
Subject Heading
気相雰囲気下半導体表面プロセス CAICISS TOF-ERDA 表面水素
水素サーフアクタント効果
イオンビームその場計測 気相成長 ドライエツチング
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