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固体炭素源を用いた2源スパツタリング法による硬質
炭化物薄膜
の高速成長
固体炭素源を用いた2源スパツタリング法による硬質炭化物薄膜の高速成長
Paper
図書
井上, 尚三, 姫路工業大学
2001-2002
<Y151-H13650097>
National Diet Library
Subject Heading
TiC
炭化物薄膜
スパツタリング 多層薄膜
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