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有機珪素化合物を用いた炭化珪素エピタキシャル成長における表面反応過程
有機珪素化合物を用いた炭化珪素エピタキシャル成長における表面反応過程
Paper
図書
安井寛治, 長岡技術科学大学 [著]
[安井寛治]
2002-2003
<Y151-H14550023>
National Diet Library
Subject Heading
炭素珪素 / エピタキシャル成長 / 表面反応 / 質量分析 / 表面構造
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