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薄膜堆積法によるX線光学素子用非球面形状の創製
薄膜堆積法によるX線光学素子用非球面形状の創製
Paper
図書
新部, 正人, 姫路工業大学
1999-2001
<Y151-H11650049>
National Diet Library
Subject Heading
軟X線 光学素子 非球面 薄膜 多層膜 リソグラフイ
点回折干渉法
波面収差
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