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短時間結晶化を利用した次世代多結晶シリコン薄膜太陽電池作製技術の開発
短時間結晶化を利用した次世代多結晶シリコン薄膜太陽電池作製技術の開発
Digital
文書・図像類
大平, 圭介
2014-06-03
科学研究費助成事業研究成果報告書
p.1-4
Other Libraries in Japan
Subject Heading
瞬間熱処理
多結晶シリコン 太陽電池 結晶化 フラッシュランプアニール
Note (General)
...ン(a-Si)膜を、ミリ秒台の
瞬間熱処理
であるフラッシュランプアニール(FLA)により結晶化する太陽...
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