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1990s(2)2000s(1)

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シリコン結晶のシエアモード研削と加工変質層の評価

Paper図書

荻田, 陽一郎, 神奈川工科大学1998-2000<Y151-H10045053>

National Diet Library

Subject Headingシエアモード研削シリコンウエーハ研削加工変質層研削ホイール超音波振動研削エンジニアリングツール鏡面...

チタン合金のダイヤモンド砥石による高品位、高能率研削仕上面の品位に関する研究

Paper図書

熊谷, 信男, 関西大学1992-1993<Y151-H04650121>

National Diet Library

Subject Headingチタン合金研削仕上面品位研削残留応力研削加工特性疲れ強さ研削加工変質層表面性状ダイヤモンド砥石

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