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ツイストローラ摩擦駆動機構を採用した超精密工作機械による微細加工の研究
ツイストローラ摩擦駆動機構を採用した超精密工作機械による微細加工の研究
Paper
図書
水本, 洋, 鳥取大学
1998-2000
<Y151-H10555042>
National Diet Library
Subject Heading
位置決め
空気静圧案内面
工作機械 精密機械 ダイヤモンド切削 超精密工作機械 能動...
能動自成絞りを用いた超精密案内機構の研究
能動自成絞りを用いた超精密案内機構の研究
Paper
図書
水本, 洋, 鳥取大学
1995-1996
<Y151-H07650178>
National Diet Library
Subject Heading
圧電素子 位置決め
空気静圧案内面
真直度 静圧軸受 静剛性 ナノテクノロジ 能動制御
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