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単結晶Al2O3膜上への超平坦・高品質Si薄膜成長法の研究
単結晶Al2O3膜上への超平坦・高品質Si薄膜成長法の研究
Paper
図書
石田誠, 豊橋技術科学大学
1996-1997
<Y151-H08455144>
National Diet Library
Subject Heading
SOI構造 Siエピタキシヤル成長
絶縁基板
MBE法 バツフア層 単結晶絶縁薄膜 基板表面制御
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