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単分子膜リソグラフィによる分子組織体と半導体回路の融合化
単分子膜リソグラフィによる分子組織体と半導体回路の融合化
Paper
図書
杉村博之, 京都大学, 名古屋大学 [著]
[杉村博之]
2002-2004
<Y151-H14205107>
National Diet Library
Subject Heading
自己組織化単分子膜 / 有機シラン / 光リソグラフィ / レーザーリソグラフィ / ナノリソグラフィ / 原子間力顕微鏡
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