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次世代400mmシリコンウエハ平坦度の自律的超精密測定システムの開発
次世代400mmシリコンウエハ平坦度の自律的超精密測定システムの開発
Paper
図書
高, 偉 (Gao, Wei) , 東北大学
2000-2002
<Y151-H12555032>
National Diet Library
Subject Heading
測定 シリコンウエハ 平坦度
角度センサ
校正 形状 光センサ 測定時間
臨界角プリズムを用いた超高精度
角度センサ
とのその自律校正システムの試作研究
臨界角プリズムを用いた超高精度角度センサとのその自律校正システムの試作研究
Paper
図書
清野, 慧, 東北大学
1993-1994
<Y151-H05555037>
National Diet Library
Subject Heading
精密測定
角度センサ
校正 自律校正 臨界角 絶対校正
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