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高出力紫外レーザ用光学平面の超精密加工と評価
高出力紫外レーザ用光学平面の超精密加工と評価
Paper
図書
難波, 義治, 中部大学
1989-
<Y151-H01550106>
National Diet Library
Subject Heading
超精密加工 フロート・ポリシング 表面粗さ 超精密研削 STM (走査型トンネル顕微鏡)
触針式表面粗さ測定器
光学式表面粗さ測定器
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