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シングルnmオーダの
超精密加工表面
形状の多重解像度解析
シングルnmオーダの超精密加工表面形状の多重解像度解析
Paper
図書
笹島和幸, 東京工業大学 [著]
[笹島和幸]
2004-2005
<Y151-H16560090>
National Diet Library
Subject Heading
超精密加工表面
/ 微細形状 / マルチスケール / 顕微鏡 / ウェーブ...
走査型近接場光学顕微鏡による
超精密加工表面
の評価
走査型近接場光学顕微鏡による超精密加工表面の評価
Paper
図書
片岡, 俊彦, 大阪大学
1992-1993
<Y151-H04452130>
National Diet Library
Subject Heading
走査型近接場光学顕微鏡 近接場 表面粗さ 圧電素子 レーザ 絶縁体表面
超精密加工表面
ニアフイールド
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