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電子ビームリソグラフイ用新透明電子伝導性酸化物薄膜の作製とその特性評価
電子ビームリソグラフイ用新透明電子伝導性酸化物薄膜の作製とその特性評価
Paper
図書
細野, 秀雄, 岡崎国立共同研究機構
1996-1997
<Y151-H07555668>
National Diet Library
Subject Heading
透明導電体
透明導電性酸化物 アモルフアス半導体
透明で金属的電気伝導を示すアモルフアス物質の特異性の解明と設計指針の確立
透明で金属的電気伝導を示すアモルフアス物質の特異性の解明と設計指針の確立
Paper
図書
細野, 秀雄, 東京工業大学
1998-1999
<Y151-H10450241>
National Diet Library
Subject Heading
アモルフアス半導体
透明導電体
電子状態 イオン注入 自由電子吸収
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