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3族窒化物半導体気相成長における応力制御による転位低減とその場観察法の確立
3族窒化物半導体気相成長における応力制御による転位低減とその場観察法の確立
Paper
図書
天野, 浩, 名城大学
1999-2000
<Y151-H11450131>
National Diet Library
Subject Heading
III族窒化物半導体 貫通転位 転位応力 有機金属化合物気相成長法 透過電子顕微鏡
鏡像転位
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