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新(熱電子放射)型プラズマCVD装置による立方晶窒化ほう素膜の形成
新(熱電子放射)型プラズマCVD装置による立方晶窒化ほう素膜の形成
Paper
図書
一ノ瀬, 幸雄, 長岡技術科学大学
1987-1988
<Y151-S62460193>
National Diet Library
Subject Heading
立方晶窒化ホウ素
閃亜鉛鉱型構造
ダイヤモンド cBN p型n型半導体 hBN 超高圧高温技...
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