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多層体の接触論を利用した薄膜の機械的特性評価法に関する研究
多層体の接触論を利用した薄膜の機械的特性評価法に関する研究
Paper
図書
尾田, 十八, 金沢大学
1992-1994
<Y151-H04452121>
National Diet Library
Subject Heading
薄膜 多層体 基板 接触理論 弾性特性
非弾性特性
逆解析 有限要素法
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