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酸素負イオンの挙動に着目したスパッタ酸化膜のエピタキシャル成長に関する研究
酸素負イオンの挙動に着目したスパッタ酸化膜のエピタキシャル成長に関する研究
Paper
図書
沖村邦雄, 東海大学 [著]
[沖村邦雄]
2004-2005
<Y151-H16540454>
National Diet Library
Subject Heading
ICP支援スパッタ装置 / ルチル型Ti酸化膜 / アナターゼ型Ti酸化膜 / エピタキシャル成長 / 高密度プラズマ生成 / アニール挙動 / 酸素負イオン生成 / 酸素ラジカル生成
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