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A Practical System for Measuring Film Thickness by Means of Laser Interference with Laminar-Like Laser

Digital文書・図像類

ZHU, Feng, ISHIKAWA, Kazuhiko, IBE, Toru, ASADA, Katsuhiko, UEDA, MasahiroThe Laser Society of Japan2004-07The Review of Laser Engineering32 7p.475-479

Other Libraries in Japan

Subject HeadingMeasuring system Film thickness Interferometery Laminar-like laser

Selected papers on optical shop metrology : pbk

Paper図書

Daniel Malacara, editorSPIE Optical Engineering Pressc1990

Other Libraries in Japan

Subject HeadingOptical measurements Interferometery Interferometers
Subject Heading (ID)Optical measurements Interferometery Interferometers

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