A Practical System for Measuring Film Thickness by Means of Laser Interference with Laminar-Like Laser

Material type: 文書・図像類

Author: ZHU, Fengほか

Publisher: The Laser Society of Japan

Publication date: 2004-07

Material Format: Digital

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Note (General)：: A practical system for measuring a film thickness based on laser interferometry has been constructed using laminar-like laser and a CCD camera. The s...

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Material Type: 文書・図像類
Title: A Practical System for Measuring Film Thickness by Means of Laser Interference with Laminar-Like Laser
Author/Editor: ZHU, Feng
ISHIKAWA, Kazuhiko
IBE, Toru
ASADA, Katsuhiko
UEDA, Masahiro
Author Heading: ZHU, Feng
ISHIKAWA, Kazuhiko
IBE, Toru
ASADA, Katsuhiko
UEDA, Masahiro
Publication, Distribution, etc.: The Laser Society of Japan
Publication Date: 2004-07
Publication Date (W3CDTF): 2004-07
Periodical title: The Review of Laser Engineering
No. or year of volume/issue: 32 7
Volume: 32
Issue: 7
Pages: 475-479
Text Language Code: eng
Subject Heading: Measuring system
Film thickness
Interferometery
Laminar-like laser
Target Audience: 一般
Note (General): A practical system for measuring a film thickness based on laser interferometry has been constructed using laminar-like laser and a CCD camera. The system can measure a film thickness at a measuring frequency of 50 Hz, which enables real-time measurement in practical use. The measurable minimum thickness by means of a blue laser having a wavelength of 405 nm was 2.4 μm, and the maximum thickness was 1.2 mm for a film with a refractive index of 1.4. The measurement error of the film thickness due to the spherical aberration of the cylindrical lens was Δh/h=2% at maximum, where h expresses film thickness and Δh its error amount.
Source: https://u-fukui.repo.nii.ac.jp/?action=repository_action_common_download&item_id=23139&item_no=1&attribute_id=22&file_no=1
https://u-fukui.repo.nii.ac.jp/?action=repository_action_common_download&item_id=23139&item_no=1&attribute_id=22&file_no=1
Access Restrictions: 限定公開
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 福井大学 : 福井大学学術機関リポジトリ