A Practical System for Measuring Film Thickness by Means of Laser Interference with Laminar-Like Laser

• 資料種別: 文書・図像類
• タイトル: A Practical System for Measuring Film Thickness by Means of Laser Interference with Laminar-Like Laser
• 著者・編者: ZHU, Feng; ISHIKAWA, Kazuhiko; IBE, Toru; ASADA, Katsuhiko; UEDA, Masahiro
• 著者標目: ZHU, Feng; ISHIKAWA, Kazuhiko; IBE, Toru; ASADA, Katsuhiko; UEDA, Masahiro
• 出版事項: The Laser Society of Japan
• 出版年月日等: 2004-07
• 出版年（W3CDTF）: 2004-07
• タイトル（掲載誌）: The Review of Laser Engineering
• 巻号年月日等（掲載誌）: 32 7
• 掲載巻: 32
• 掲載号: 7
• 掲載ページ: 475-479
• 本文の言語コード: eng
• 件名標目: Measuring system; Film thickness; Interferometery; Laminar-like laser
• 対象利用者: 一般
• 一般注記: A practical system for measuring a film thickness based on laser interferometry has been constructed using laminar-like laser and a CCD camera. The system can measure a film thickness at a measuring frequency of 50 Hz, which enables real-time measurement in practical use. The measurable minimum thickness by means of a blue laser having a wavelength of 405 nm was 2.4 μm, and the maximum thickness was 1.2 mm for a film with a refractive index of 1.4. The measurement error of the film thickness due to the spherical aberration of the cylindrical lens was Δh/h=2% at maximum, where h expresses film thickness and Δh its error amount.
• オンライン閲覧公開範囲: 限定公開
• 連携機関・データベース: 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）; https://irdb.nii.ac.jp
• 提供元機関・データベース: 福井大学 : 福井大学学術機関リポジトリ