タイトル(掲載誌)The Review of Laser Engineering
一般注記A practical system for measuring a film thickness based on laser interferometry has been constructed using laminar-like laser and a CCD camera. The system can measure a film thickness at a measuring frequency of 50 Hz, which enables real-time measurement in practical use. The measurable minimum thickness by means of a blue laser having a wavelength of 405 nm was 2.4 μm, and the maximum thickness was 1.2 mm for a film with a refractive index of 1.4. The measurement error of the film thickness due to the spherical aberration of the cylindrical lens was Δh/h=2% at maximum, where h expresses film thickness and Δh its error amount.
一次資料へのリンクURLhttps://u-fukui.repo.nii.ac.jp/?action=repository_action_common_download&item_id=23139&item_no=1&attribute_id=22&file_no=1
連携機関・データベース国立情報学研究所 : 学術機関リポジトリデータベース(IRDB)(機関リポジトリ)