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MEMS微細構造の機械的信頼性向上のための単結晶シリコンの引張およびねじり強度に及ぼす水素含有非晶質炭素多層膜の影響評価

MEMS微細構造の機械的信頼性向上のための単結晶シリコンの引張およびねじり強度に及ぼす水素含有非晶質炭素多層膜の影響評価
Digital博士論文障害者向け資料あり
夏, 园林Kyoto University2022-09-26
Available onlineNational Diet LibraryOther Libraries in Japan
  • Subject Heading...al reliability Single crystal silicon
  • Alternative Title...al Strength of Single Crystal Silicon for Mechanical Reliability En...
  • Alternative Title...al Strength of Single Crystal Silicon for Mechanical Reliability En...

Surface modification and mechanical reliability enhancement of free-standing single crystal silicon microstructures using localized KrF excimer laser annealing

Surface modification and mechanical reliability enhancement of free-standing single crystal silicon microstructures using localized KrF excimer laser annealing
Digital博士論文障害者向け資料あり
Mitwally, Mohamed Elwi2015-05-25
Available onlineNational Diet LibraryOther Libraries in Japan
  • Subject HeadingLaser annealing Single crystal silicon Surface roughness Tensile str...

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