Surface modification and mechanical reliability enhancement of free-standing single crystal silicon microstructures using localized KrF excimer laser annealing

Persistent ID (NDL): info:ndljp/pid/9529795

Material type: 博士論文

Author: Mitwally, Mohamed Elwi

Publisher: 京都大学 (Kyoto University)

Publication date: 2015-05-25

Material Format: Digital

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Name of awarding university/degree: 京都大学,博士(工学),Doctor of Philosophy (Engineering)

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Note (General)：: 元資料の権利情報 : 許諾条件により本文は2016-04-01に公開

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Material Type: 博士論文
Title: Surface modification and mechanical reliability enhancement of free-standing single crystal silicon microstructures using localized KrF excimer laser annealing
Author/Editor: Mitwally, Mohamed Elwi
Author Heading: Mitwally, Mohamed Elwi
Publication, Distribution, etc.: 京都大学 (Kyoto University)
Publication Date: 2015-05-25
Publication Date (W3CDTF): 2015-05-25
Alternative Title: 単結晶シリコン自立マイクロ構造のKrFエキシマレーザ局所アニールによる表面改質および機械的信頼性向上
Contributor: 田畑, 修
琵琶, 志朗
土屋, 智由
松原, 厚
Degree grantor/type: 京都大学
Date Granted: 2015-05-25
Date Granted (W3CDTF): 2015-05-25
Dissertation Number: 甲第19184号
Degree Type: 博士(工学)
Doctor of Philosophy (Engineering)
Conferring No. (Dissertation): 甲第19184号
Text Language Code: eng
Alias of Author: モハメド, エルウィミトゥワリ
Subject Heading: Laser annealing
Single crystal silicon
Surface roughness
Tensile strength
Fatigue life
NDC: 500
Target Audience: 一般
Note (General): 元資料の権利情報 : 許諾条件により本文は2016-04-01に公開
DOI: 10.14989/doctor.k19184
https://doi.org/10.14989/doctor.k19184
Persistent ID (NDL): info:ndljp/pid/9529795
https://dl.ndl.go.jp/pid/9529795
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
https://dl.ndl.go.jp/collections/A00014
Acquisition Basis: 博士論文（自動収集）
Date Accepted (W3CDTF): 2015-11-01T14:53:18+09:00
Date Created (W3CDTF): 2016-04-01
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): http://dx.doi.org/10.14989/doctor.k19184
http://hdl.handle.net/2433/200447
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp

Surface modification and mechanical reliability enhancement of free-standing single crystal silicon microstructures using localized KrF excimer laser annealing

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