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(Ti,Al)NのCVD成膜における移動現象と膜組成制御
(Ti,Al)NのCVD成膜における移動現象と膜組成制御
Paper
図書
菊池, 淳, 東北大学
1996-1998
<Y151-H08455343>
National Diet Library
(Ti,Al)NのCVD成膜における移動現象と膜組成制御
(Ti,Al)NのCVD成膜における移動現象と膜組成制御
Paper
図書
菊池淳研究代表者
[菊池淳]
1999.3
Other Libraries in Japan
科学研究費補助金(基盤研究(B)(2))研究成果報告書
科学研究費補助金(基盤研究(B)(2))研究成果報告書
Paper
図書
[発行者不定]
Other Libraries in Japan
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(Ti,Al)NのCVD成膜における移動現象と膜組成制御
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