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Bibliographic Record
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- Material Type
- 図書
- Title Transcription
- (Ti,Al)N ノ CVD セイマク ニ オケル イドウ ゲンショウ ト マク ソセイ セイギョ
- Author/Editor
- 菊池, 淳, 東北大学
- Author Heading
- 菊池, 淳 キクチ, アツシ
- Publication Date
- 1996-1998
- Publication Date (W3CDTF)
- 1996
- Extent
- 冊
- Additional Title
- 研究種目 基盤研究(B)