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岩田, 博之, 高木, 誠, 徳田, 豊, 井村, 徹愛知工業大学2003-01-20総合技術研究所研究報告=Bulletin of Research Institute for Industrial Technology.4p.55-58

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Alternative Titleプロトンハクリゲンショウニオケルフジュンブツイゾンセイ Impurity Dependence of Exfoliation in Proton-implanted Silicon
Alternative Titleプロトンハクリゲンショウニオケルフジュンブツイゾンセイ Impurity Dependence of Exfoliation in Proton-implanted Silicon

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