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Numerical studies of the electromagnetic fields and plasma properties in a microwave plasma source excited by azimuthally symmetric surface waves

Numerical studies of the electromagnetic fields and plasma properties in a microwave plasma source excited by azimuthally symmetric surface waves
Paper博士論文
Hiroyuki Kousaka [著][Hiroyuki Kousaka]2003<UT51-2003-N921>
National Diet Library

軸対称表面波励起マイクロ波プラズマ源における電磁界とプラズマ特性に関する数値的研究

軸対称表面波励起マイクロ波プラズマ源における電磁界とプラズマ特性に関する数値的研究
Digital博士論文
Kosaka, Hiroyuki京都大学 (Kyoto University)2003-07-23
Available onlineOther Libraries in Japan
  • Alternative TitleNumerical Studies of the Electromagnetic Fields and Plasma Properties in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves
  • Alternative TitleNumerical Studies of the Electromagnetic Fields and Plasma Properties in a Microwave Plasma Source Excited by Azimuthally Symmetric Surface Waves

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