Numerical studies of the electromagnetic fields and plasma properties in a microwave plasma source excited by azimuthally symmetric surface waves

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Material Type: 博士論文
Title: Numerical studies of the electromagnetic fields and plasma properties in a microwave plasma source excited by azimuthally symmetric surface waves
Author/Editor: Hiroyuki Kousaka [著]
Author Heading: 上坂, 裕之コウサカ, ヒロユキ
Publication, Distribution, etc.: [Hiroyuki Kousaka]
Publication Date: 2003
Publication Date (W3CDTF): 2003
Extent: 1冊
Alternative Title: 軸対称表面波励起マイクロ波プラズマ源における電磁界とプラズマ特性に関する数値的研究ジクタイショウヒョウメンハレイキマイクロハプラズマゲンニオケルデンジカイトプラズマトクセイニカンスルスウチテキケンキュウ
Degree grantor/type: 京都大学
Date Granted: 平成15年7月23日
Date Granted (W3CDTF): 2003
Dissertation Number: 甲第10430号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2003-N921
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004252802
http://id.ndl.go.jp/bib/000004252802
Bibliographic Record Category (NDL): 213