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Submicron lithography / Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 333)

Submicron lithography / Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 333)
Paper図書
International Society for Optical Engineering1982.<M15-A5689>
National Diet Library

Electron-beam, X-ray, and ion-beam techniques for submicron lithographies II : March 14-15, 1983, Santa Clara, California / Phillip D. Blais, chairman/editor ; sponsored by SPIE--the International Society for Optical Engineering in cooperation with National Bureau of Standards, International Society for Hybrid Microelectronics, Northern California Microphotomask/Masking Working Group. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 393)

Electron-beam, X-ray, and ion-beam techniques for submicron lithographies II : March 14-15, 1983, Santa Clara, California / Phillip D. Blais, chairman/editor ; sponsored by SPIE--the International Society for Optical Engineering in cooperation with National Bureau of Standards, International Society for Hybrid Microelectronics, Northern California Microphotomask/Masking Working Group. (Proceedings of SPIE--the International Society for Optical Engineering ; v. 393)
Paper図書
SPIEc1983.<ND386-39>
National Diet Library

Submicron lithography pbk.

Submicron lithography pbk.
Paper図書
Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, CaliforniaInternational Society for Optical Engineering1982
Other Libraries in Japan

The physics of submicron lithography

The physics of submicron lithography
Paper図書
Kamil A. ValievPlenum Pressc1992
Other Libraries in Japan

SOFT X-RAY REDUCTION CAMERA FOR SUBMICRON LITHOGRAPHY (PATENTS-US ; PATENTS-US-A7308332)

SOFT X-RAY REDUCTION CAMERA FOR SUBMICRON LITHOGRAPHY (PATENTS-US ; PATENTS-US-A7308332)
Paper図書
(LAWRENCE LIVERMORE NATIONAL LAB., CA (USA))1989.
Other Libraries in Japan

Electron-beam, X-ray, and ion-beam techniques for submicron lithographies II : March 14-15, 1983, Santa Clara, California pbk.

Electron-beam, X-ray, and ion-beam techniques for submicron lithographies II : March 14-15, 1983, Santa Clara, California pbk.
Paper図書
Phillip D. Blais, chairman/editor ; sponsored by SPIE--the International Society for Optical Engineering in cooperation with National Bureau of Standards, International Society for Hybrid Microelectronics, Northern California Microphotomask/Masking Working GroupSPIEc1983
Other Libraries in Japan

Proceedings

Proceedings
Paper図書
SPIE -- the International Society for Optical EngineeringSPIE -- the International Society for Optical Engineering
Other Libraries in Japan
  • Related Material...go, California Submicron lithography Window and dome technologies ...

Microdevices : physics and fabrication technologies

Microdevices : physics and fabrication technologies
Paper図書
Plenum Press
Other Libraries in Japan
  • Related Material...The physics of submicron lithography Field emission in vacuum micr...

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